High precision wafer alignment sensor

Utilizing a safe LED light beam the HD-T1 series is capable of high precision detection of wafer orientation with a resolution of 30 microns. It's comprised of sensor head and easy to connect controller with 1-5 volt analog output.

Resources

SUNX LED WAFER ALIGNMENT SENSOR

Panasonic HD-T1030 Wafer Alignment Sensor

Item #: HD-T1030
Product Line: Panasonic Industrial Devices Sunx

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UOM : EA

SUNX WAFER ALIGNMENT AMP 1-5VDC

Panasonic HD-T1C Wafer Alignment Controller

Item #: HD-T1C
Product Line: Panasonic Industrial Devices Sunx

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UOM : EA